TECHNIQUES IN INTEGRATED CIRCUIT (IC) FAILURE ANALYSIS
Z. Jamal* & S. Taking
Abstract
TECHNIQUES IN INTEGRATED CIRCUIT (IC) FAILURE ANALYSIS
- Jamal* & S. Taking
School of Microelectronic Engineering, Blok A Kompleks Pusat Pengajian Kolej Universiti Kejuruteraan Utara Malaysia, Jalan Arau-Kangar Jejawi, 02600 Arau, Perlis
Failure analysis (FA) plays an important role in the development and manufacturing of integrated circuits. It provides necessary information for technology advancement and for corrective action to improve quality and reliability. In this paper the commonly used techniques in integrated circuits failure analysis are discussed. The paper also describes the basic FA flow consists of fault localization, deprocessing, defect localisation and inspection characterisation.
* Z. Jamal: Tel. + 6 (04) 9798140 ; Fax. + 6 (04) 979 8305 E-mail. zulazhar@kukum.edu.my
